Introduction to Microlithography
Product Specifications
- Title: Introduction to Microlithography
- Author: Introduction to Microlithography
- Publisher: American Chemical Society
- Binding: Hardback
- Art forms
- No. of pages: 540
- Dimensions (approx. mm): 229 x 168 x 33
Product Description
Reviews the theory materials and processes that are used in the lithographic process. It opens with a brief historical introduction to microlithography and then discusses four major topics - the physics of the lithographic process organic resist materials resist processing and plasm etching.